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MEMS GAS SENSOR
The USI thermal conductivity gas sensor incorporates
advanced design innovations in MEMS
(Micro-Electrical-Mechanical-Systems), and was developed and
manufactured in Silicon Valley
FEATURES
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Sensitivity range: 1 –
100% by volume
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Leak detection
sensitivity in cc/sec 2x10-5
for He, 1x10-4
for CH4,
1x10-4
R12 (dichlorodifluoromethane), and 2x10-4
for Ar.
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Longer term
operational stability
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Physical contact
gas concentration measurement
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Micro power
consumption
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Miniaturized
package form factor
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Mass market low
cost custom packaging
T YPICAL
APPLICATIONS
Natural gas
quality control
Combustion
control
Natural gas
engine control
Industrial process control
Relative gas thermal conductivity versus temperature
Comparison of catalytic sensor and advanced thermal conductivity
sensor
Table 1: Sensor specification
Table 2: Recommended electrical operating condition
Table 3: Reference performance characteristics (using
general reference measurement circuit)
TO5-4 Package
  
General reference measurement circuit
Accuracy reference measurement circuit
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UNIVERSAL
SEMICONDUCTOR 
